MOCVD carrier boat

MOCVD means Metal Organic Chemical Vapor Deposition. As the market for compound semiconductor devices such as GaAsMMIC, InPMMIC, and GaN blue LEDs continues to expand, the application of MOCVD systems continues to grow.
In the epitaxial coating process of MOCVD reaction equipment, the properties of the MOCVD base material have a very important influence on the coating. The choice of the base graphite material and the processing technology have a close influence on the SiC coating. Factors inclu