Graphite PECVD Carrier boat

The PECVD graphite boat is used as the carrier of the normal silicon wafer during the production of the coating process. There are many boats with a certain interval in the structure, and there is a narrow space between two adjacent boats, and silicon is placed on both sides of the empty gate. piece.

Because graphite, the material of the graphite boat, has good electrical and thermal conductivity, an alternating voltage is passed between two adjacent boats, so that the two adjacent boats form positive and negative electrodes. When there is a certain pressure and gas in the chamber , A glow discharge occurs between the two boats. The glow discharge can decompose the SiH4 and NH3 gases in the space to form Si and N ions, which combine to form SiNx molecules, which are deposited on the surface of the silicon wafer to achieve its coating. Purpose